ITEM METADATA RECORD
Title: Plasma modification of porous low-k dielectrics
Authors: Le, Quoc Toan ×
Whelan, Caroline
Struyf, Herbert
Bender, Hugo
Conard, Thierry
Brongersma, Sywert
Boullart, Werner
Vanhaelemeersch
Maex, Karen #
Issue Date: Sep-2004
Series Title: Electrochemical and Solid-State Letters vol:7 issue:9 pages:F49-F53
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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