Title: Depth profiling of B through silicide on silicon structures, using SIMS and resonant post-ionisation SIMS
Authors: De Bisschop, Peter ×
Gomez, J
Geenen, Luc
Vandervorst, Wilfried #
Issue Date: 1995
Host Document: pages:22/01/07
Conference: Proceedings of the 3rd International Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semicon location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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