Title: Fabrication of 50nm high performance strained-SiGe pMOSFETs with selective epitaxial growth
Authors: Loo, Roger ×
Collaert, Nadine
Verheyen, Peter
Caymax, Matty
Delhougne, Romain
De Meyer, Christina #
Issue Date: 2004
Series Title: Applied Surface Science vol:224 issue:01/04/07 pages:292-296
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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