Title: Residual stresses in tungsten lines: Analysis of experimental (micro-Raman spectroscopy, XRD) and numerical results
Authors: De Wolf, Ingrid ×
Maes, Herman
Moffet, J
Ignat, M #
Issue Date: 1995
Host Document: pages:109-114
Conference: Materials Reliability in Microelectronics V; 17-21 April 1995; San Francisco, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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