Title: Stress variation across arrays of lines and its influence on LOCOS oxidation
Authors: De Wolf, Ingrid ×
Rooyackers, Rita
Maes, Herman #
Issue Date: 1995
Series Title: Microelectronic Engineering vol:28 issue:01/04/07 pages:79-82
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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