Title: Self-annealing characterization of electroplated copper films
Authors: Lagrange, Sébastien ×
Brongersma, Sywert
Judelewicz, Moshe
Saerens, Annelies
Vervoort, Iwan
Richard, Emmanuel
Palmans, Roger
Maex, Karen #
Issue Date: 2000
Series Title: Microelectronic Engineering vol:50 issue:01/04/07 pages:449-457
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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