ITEM METADATA RECORD
Title: The importance of the determination of polysilicon dopant profile during process development
Authors: Debusschere, Ingrid ×
Deferm, Ludo
Vandervorst, Wilfried #
Issue Date: 1995
Host Document: pages:13/01/07-13/08/07
Conference: Proceedings of the 3rd International Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semicon location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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