Title: Microroughness of Clean Silicon Surfaces and Gate Oxide Breakdown
Authors: Depas, Michel
Crossley, A
Vermeire, Bert
Mertens, Paul
Sofield, C. J
Heyns, Marc
Issue Date: 1995
Conference: 26th IEEE Semiconductor Interface Specialists' Conference; December 7-9, 1995; Charleston, South Carolina, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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