Title: Topside release of atomic force microscopy probes with molded diamond tips
Authors: Fouchier, Marc ×
Eyben, Pierre
Jamieson, Geraldine
Vandervorst, Wilfried #
Issue Date: Mar-2005
Series Title: Microelectronic Engineering vol:78-79 pages:73-78
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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