Title: Removal of nano-particles and structural damage in megasonic cleaning of silicon wafers
Authors: Vereecke, Guy
Holsteyns, Frank
Arnauts, Sophia
Kenis, Karine
Lux, Marcel
Vos, Rita
Snow, Jim
Mertens, Paul
Issue Date: 2004
Conference: 9th International Symposium on Particles on Surfaces location:Leuven Belgium date:16/06/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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