Title: Performance of a linear single wafer IPA vapour based drying system
Authors: Fyen, Wim ×
Arnauts, Sophia
Holsteyns, Frank
Doumen, Geert
Vereecke, Guy
Van Steenbergen, Jan
Mertens, Paul #
Issue Date: 2004
Publisher: Sci-Tech Publications
Series Title: Diffusion and Defect Data B, Solid State Phenomena vol:103-104 pages:75-78
Conference: 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS location:Leuven Belgium date:20/09/04
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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