|ITEM METADATA RECORD
|Title: ||The impact of backside particles on the limits of optical lithography|
|Authors: ||Bearda, Twan|
De Bisschop, Peter
van Meer, R
|Issue Date: ||2004 |
|Conference: ||7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS location:Leuven Belgium date:20/09/04|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Clinical Residents Medicine|
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