ITEM METADATA RECORD
Title: The impact of backside particles on the limits of optical lithography
Authors: Bearda, Twan ×
Mertens, Paul
Holsteyns, Frank
De Bisschop, Peter
Compen, R
van Meer, R
Heyns, Marc #
Issue Date: 2004
Publisher: Sci-Tech Publications
Series Title: Diffusion and Defect Data B, Solid State Phenomena vol:103-104 pages:129-132
Conference: 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS location:Leuven Belgium date:20/09/04
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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