ITEM METADATA RECORD
Title: The influence of oxygen on the Hf signal intensity in the characterization of HfO2/Si stacks
Authors: Huyghebaert, Cedric ×
Conard, Thierry
Vandervorst, Wilfried #
Issue Date: 2004
Series Title: Applied Surface Science vol:231-232 pages:552-555
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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