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Title: Optimization of the ferroelectric film for application in scaled FeFET
Authors: Viapiana, Matteo
Xu, Zhen
Goux, Ludovic
Kaczer, Ben
Groeseneken, Guido
Wouters, Dirk
Issue Date: 2004
Conference: MRS Fall Meeting Symposium D: Materials and Processes for Nonvolatile Memories location:Leuven Belgium date:29/11/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors

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