Title: Selective wet etching of Hf-based layers on a single-wafer spin processor
Authors: Kraus, Harald
Kovacs, F
Snow, Jim
Claes, Martine
Paraschiv, Vasile
Vos, Rita
Mertens, Paul
De Gendt, Stefan
Heyns, Marc
Issue Date: 2004
Conference: ISTC Meeting location:Leuven Belgium date:15/09/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine
Molecular Design and Synthesis

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