This item still needs to be validated !
Title: Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors
Authors: Goux, Ludovic
Xu, Zhen
Paraschiv, Vasile
Schwitters, M
Lisoni, Judit
Maes, David
Haspeslagh, Luc
Groeseneken, Guido
Zambrano, R
Wouters, Dirk
Issue Date: 2004
Conference: Journées Couches Ferroelectriques - JCF location:Leuven Belgium date:18/11/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.