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Title: Atomic layer deposition of hafnium oxide on germanium substrates
Authors: Delabie, Annelies ×
Puurunen, R
Brijs, Bert
Caymax, Matty
Conard, Thierry
Onsia, Bart
Richard, Olivier
Vandervorst, Wilfried
Zhao, Chao
Heyns, Marc
Meuris, Marc
Viitanan, Minna M
Brongersma, Hidde H
de Ridder, M
Goncharova, L
Garfunkel, Eric
Gustafsson, Torgny
Tsai, Wilman #
Issue Date: Mar-2005
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:97 issue:6 pages:64104
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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