Title: On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers
Authors: Petry, Jasmine ×
Vandervorst, Wilfried
Pantisano, Luigi
Degraeve, Robin #
Issue Date: 2004
Conference: 13th Workshop on DIelectrics in Microelectronics - Wodim location:Leuven Belgium date:28/06/04
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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