|ITEM METADATA RECORD
|Title: ||Evaluation of trap creation and charging in thin SiO2 using both SCM and C-AFM|
|Authors: ||Polspoel, Wouter ×|
Vandervorst, Wilfried #
|Issue Date: ||Mar-2007 |
|Series Title: ||Microelectronic Engineering vol:84 issue:3 pages:495-500|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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