Title: Evaluation of trap creation and charging in thin SiO2 using both SCM and C-AFM
Authors: Polspoel, Wouter ×
Vandervorst, Wilfried #
Issue Date: Mar-2007
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:84 issue:3 pages:495-500
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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