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Title: A comparative study of copper drift diffusion in plasma deposited A-Sic:H and silicon nitride
Authors: Lanckmans, Filip
Gray, William
Brijs, Bert
Maex, Karen
Issue Date: 2000
Conference: Materials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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