Title: Megasonic, non-contact cleaning followed by "Rotagoni" drying of CMP wafers
Authors: Lauerhaas, Jeff
Mertens, Paul
Nicolosi, T
Kenis, Karine
Fyen, Wim
Heyns, Marc
Issue Date: 2000
Conference: 5th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS2000); 18-20 September 2000; Oostende, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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