Title: Etching of CoSi2 in HF-based solutions
Authors: Donaton, R. A ×
Lokere, K
Verbeeck, Rita
Maex, Karen #
Issue Date: 1995
Series Title: Appl. Surf. Sci. vol:89 issue:3 pages:221-7
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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