Title: Optimized thermal processing for Ti-capped CoSi2 for 0.13µm technology
Authors: Lindsay, Richard
Lauwers, A
de Potter de ten Broeck, Muriel
Roelandts, Nico
Vrancken, Christa
Maex, Karen
Issue Date: 2000
Conference: Materials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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