|ITEM METADATA RECORD
|Title: ||Optimized thermal processing for Ti-capped CoSi2 for 0.13µm technology|
|Authors: ||Lindsay, Richard|
de Potter de ten Broeck, Muriel
|Issue Date: ||2000 |
|Conference: ||Materials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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