Title: Development of an environmentally-friendly HCl gas-phase clean
Authors: Elsmore, Chris ×
Meuris, Marc
Mertens, Paul
Hurd, Trace
Heyns, Marc #
Issue Date: 1995
Host Document: pages:487
Conference: Proceedings IES 41st Annual Technical Meeting; April 30 - May 5, 1995; Anaheim, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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