Title: Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with other established techniques
Authors: Loo, Roger ×
Caymax, Matty
Libezny, Milan
Blavier, G
Brijs, Bert
Geenen, Luc
Vandervorst, Wilfried #
Issue Date: Feb-2000
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:147 issue:2 pages:751-755
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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