Title: A less critical cleaning procedure for silicon wafer using diluted HF dip and boiling in isopryl alcohol as final steps
Authors: Gomes dos Santos Filho, S ×
Hasenack, Claus
Salay, L. C
Mertens, Paul #
Issue Date: 1995
Series Title: Journal of the Electrochemical Society vol:142 pages:902-907
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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