Title: TSUPREM4 based modeling of boron and carbon diffusion in SiGeC base layers under rapid thermal annealing conditions
Authors: Sibaja-Hernandez, Arturo ×
Xu, Mingwei
Decoutere, Stefaan
Maes, Herman #
Issue Date: 2004
Publisher: Pergamon
Series Title: Materials Science in Semiconductor processing vol:8 issue:1 pages:115-120
ISSN: 1369-8001
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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