Title: Creep characterization of Al alloy thin films for use in MEMS applications
Authors: Modlinski, Robert ×
Witvrouw, Ann
Ratchev, Petar
Puers, Robert
den Toonder, Jaap M.J
De Wolf, Ingrid #
Issue Date: 2004
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:76 issue:1-4 pages:272-278
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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