Investigation of crystal defects in As-grown and processed silicon wafers and heteroepitaxial layers by infrared light scattering

Proceedings of the Satellite Symposium to ESSDERC 95.ALTECH 95. Analytical Techniques for Semiconductor Materials and Process Ch

Publication date: 1995-01-01

Pages: 156 - 165

Kissinger, G

Vanhellemont, Jan ; Gräf, D ; Zulehner, W ; Claeys, Cor ; Richter, H ; Claeys, Cor