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Title: Influence of mechanical stress on the electrical performance of polycrystalline-silicon resistors
Authors: Nakabayashi, M
Ohyama, Hidenori
Kobayashi, K
Yoneoka, M
Simoen, Eddy
Claeys, Cor
Takami, Y
Sunaga, H
Takizawa, H
Issue Date: 2000
Conference: MRS Spring Meeting 2000. Symposium A:Amorphous and Heterogeneous Silicon Thin Films - 2000; 24-28 April 2000; San Francisco, Ca,
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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