Title: Ti/Co bilayers in salicide technology: electrical evaluation
Authors: Lauwers, A ×
Wang, Qingfeng
Deweerdt, Bruno
Maex, Karen #
Issue Date: 1995
Series Title: Appl. Surf. Sci. vol:91 pages:12-18
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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