Title: Characterisation of Cu surface cleaning by downstream N2/H2 plasma
Authors: Baklanov, Mikhaïl ×
Shamiryan, Denis
Beyer, Gerald
Conard, Thierry
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 2001
Host Document: pages:153-159
Conference: Advanced Metallization Conference 2000 date:03/10/00
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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