Title: Characterization of Cu surface cleaning by hydrogen plasma
Authors: Baklanov, Mikhaïl ×
Shamiryan, Denis
Tokei, Zsolt
Beyer, Gerald
Conard, Thierry
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 2001
Series Title: Journal of Vacuum Science & Technology B vol:19 issue:4 pages:1201-1211
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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