Title: Studies of Copper surfaces modified by thermal and plasma treatments
Authors: Beyer, Gerald ×
Baklanov, Mikhaïl
Conard, Thierry
Maex, Karen #
Issue Date: 2001
Host Document: pages:D9.17.1-D9.17.6
Conference: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; MRS Spring Meeting 2000 Symposium. location:Leuven Belgium date:23/04/00
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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