|ITEM METADATA RECORD
|Title: ||Studies of Copper surfaces modified by thermal and plasma treatments|
|Authors: ||Beyer, Gerald ×|
Maex, Karen #
|Issue Date: ||2001 |
|Host Document: ||pages:D9.17.1-D9.17.6|
|Conference: ||Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; MRS Spring Meeting 2000 Symposium. location:Leuven Belgium date:23/04/00|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.