|ITEM METADATA RECORD
|Title: ||Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS|
|Authors: ||Borden, P ×|
Peytier, Y #
|Issue Date: ||2001 |
|Host Document: ||pages:161|
|Conference: ||Proceedings of the 6th International Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.