Title: Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS
Authors: Borden, P ×
Bechtler, L
Klemme, B
Nijmeijer, R
Judge, E
Diebold, A
Bennett, J
Vandervorst, Wilfried
Clarysse, Trudo
Peytier, Y #
Issue Date: 2001
Host Document: pages:161
Conference: Proceedings of the 6th International Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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