Title: ALCVD hafnium silicates for low power gate stacks
Authors: Maes, J
Laitinen, O
De Witte, H
Deweerd, Wim
Delabie, Annelies
Conard, Thierry
Brijs, Bert
Wang, C. - G
Velasco, H
Wilk, G
Issue Date: 2004
Conference: Atomic Layer Deposition Conference location:Leuven Belgium date:16/08/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Non-KU Leuven Association publications

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