|ITEM METADATA RECORD
|Title: ||ALCVD hafnium silicates for low power gate stacks|
|Authors: ||Maes, J|
De Witte, H
Wang, C. - G
|Issue Date: ||2004 |
|Conference: ||Atomic Layer Deposition Conference location:Leuven Belgium date:16/08/04|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Non-KU Leuven Association publications|
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