ITEM METADATA RECORD
Title: In-situ cleaning and passivation of oxidized Cu surfaces by alkanethiols and its application to wire bonding
Authors: Whelan, Caroline ×
Kinsella, M
Ho, H.M
Maex, Karen #
Issue Date: 2004
Publisher: Minerals, Metals & Materials Society and IEEE
Series Title: Journal of Electronic Materials vol:33 issue:9 pages:1005-1011
ISSN: 0361-5235
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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