Title: Advanced RBS analysis of thin films in micro-electronics
Authors: Brijs, Bert ×
Deleu, Jeroen
Huyghebaert, Cedric
Nauwelaerts, Sophie
Nakajima, K
Kimura, K
Vandervorst, Wilfried #
Issue Date: 2001
Host Document: pages:470-475
Conference: Application of Accelerators in Research and Industry: Sixteenth International Conference; Denton, TX, USA, 1-5 Nov 2000. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science