Title: Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
Authors: Brijs, Bert
Huyghebaert, Cedric
Nauwelaerts, Sophie
Caymax, Matty
Vandervorst, Wilfried
Nakajima, K
Kimura, K
Bergmaier, A
Dollinger, G
Lennard, W. N
Terwagne, G
Vantomme, André
Issue Date: 2001
Conference: 15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous

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