Title: Surface and grain boundary scattering studied in beveled polycrystalline thin copper films
Authors: Zhang, Wenqi ×
Brongersma, Sywert
Clarysse, Trudo
Terzieva, Valentina
Rosseel, Erik
Vandervorst, Wilfried
Maex, Karen #
Issue Date: Jul-2004
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:22 issue:4 pages:1830-1833
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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