ITEM METADATA RECORD
Title: Metal film characterization with qualified spreading resistance
Authors: Clarysse, Trudo ×
Hoflijk, Ilse
Zhang, Wenqi
Maex, Karen
Vandervorst, Wilfried #
Issue Date: Jan-2004
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:22 issue:1 pages:444-449
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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