Title: Impurity determination in narrow copper lines
Authors: Zhang, Wenqi
Brongersma, Sywert
Conard, Thierry
Vandervorst, Wilfried
Maex, Karen
Issue Date: 2004
Conference: Advanced Metallization Conference location:San Diego, CA, USA date:19/10/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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