Title: Comprehensive electromigration studies of dual-damascene Cu interconnects with ALD WCxNy barriers
Authors: Bruynseraede, Christophe ×
Fisher, A.H
Ungar, F
Schuhmacher, Jorg
Sutcliffe, Victor
Michelon, Julien
Maex, Karen #
Issue Date: 2004
Publisher: IEEE
Conference: Proceedings of the IEEE International Interconnect Technology Conference location:San Francisco, CA, USA date:07/06/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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