Title: Electromigration study of sub-100nm lines
Authors: Michelon, Julien
Bruynseraede, Christophe
Tio Castro, David
Roussel, Philippe
Hoofman, Romano
Maex, Karen
Issue Date: 2004
Conference: Advanced Metallization Conference location:San Diego, CA, USA date:19/10/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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