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Title: Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
Authors: Abell, Thomas ×
Iacopi, Francesca
Prokopowicz, Greg
Sun, Brad
Mazurenko, Alex
Travaly, Youssef
Baklanov, Mikhaïl
Jonas, Alain
Sullivan, Chris
Brongersma, Sywert
Liou, Huey-Chiang
Tower, Josua
Gostein, Michael
Gallagher, Mike
Calvert, Jeff
Moinpour, Mansour
Maex, Karen #
Issue Date: Jan-2005
Publisher: MRS
Conference: AMC conference proceedings location:San Diego, CA, USA date:19/10/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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