|ITEM METADATA RECORD
|Title: ||Super secondary grain growth in the barrier/seedlayer system|
|Authors: ||Vanstreels, Kris|
De Ceuninck, Ward
|Issue Date: ||Jan-2005 |
|Host Document: ||Advanced Metallization Conference 2004 pages:327-331|
|Conference: ||21st Advanced Metallization Conference 2004 location:San Diego, CA, USA date:19/10/04|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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