ITEM METADATA RECORD
Title: Super secondary grain growth in the barrier/seedlayer system
Authors: Vanstreels, Kris
Brongersma, Sywert
Demuynck, Steven
D'Haen, Jan
De Ceuninck, Ward
D'Olieslaeger, Marc
Maex, Karen
Issue Date: Jan-2005
Publisher: MRS
Host Document: Advanced Metallization Conference 2004 pages:327-331
Conference: 21st Advanced Metallization Conference 2004 location:San Diego, CA, USA date:19/10/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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