Title: Characterization of (near) hermetic zero-level packages for MEMS
Authors: De Moor, Piet ×
Baert, Kris
De Wolf, Ingrid
Jourdain, Anne
Tilmans, Harrie
Witvrouw, Ann
Van Hoof, Chris #
Issue Date: 2005
Publisher: SPIE
Host Document: Proc. SPIE vol:5716 issue:1 pages:26-35
Conference: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV location:San Jose, USA date:Jan 24-25 2005
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Structural Composites and Alloys, Integrity and Nondestructive Testing
Production Engineering, Machine Design and Automation (PMA) Section
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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