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Title: Nitrogen analysis in high-k stack layers: a challenge
Authors: Conard, Thierry
Vandervorst, Wilfried
De Witte, H
Van Elshocht, Sven #
Issue Date: 2004
Series Title: Applied Surface Science vol:231-232 pages:581-584
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
# (joint) last author

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