Title: ToF-SIMS profiling of HfO2/Si stacks: influence of sputtering condition of profile shape
Authors: Conard, Thierry ×
Huyghebaert, Cedric
Vandervorst, Wilfried #
Issue Date: 2004
Series Title: Applied Surface Science vol:231-232 pages:574-580
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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