Title: On the reliability of SIMS depth profiles through HfO2-stacks
Authors: Vandervorst, Wilfried
Bennett, J
Huyghebaert, Cedric
Conard, Thierry
Gondran, C
De Witte, H #
Issue Date: 2004
Series Title: Applied Surface Science vol:231-232 pages:569-573
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
# (joint) last author

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